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Verionix' Vx-3100 is the only full-featured sensor on the market today that is capable of measuring changes in the composition
of gas flows and gas-enabled processes in environments from 1 Torr to 15 psig without the use of bulky differential pumps.
The Vx-3100 provides a complete view into the transient and steady state
composition of gases found in many higher pressure processes and gas distribution networks, verifying gas purity, increasing process yield and advancing tool productivity. It's uniquely self-contained with a microplasma light source, spectrometer, RF power supply supported by an embedded microprocessor that is capable of providing full analysis and reporting of data without the need of an attached computer. Binary or Multi-component gas environments can be analyzed.
Looking trace Nitrogen contamination in bulk gas supplies such as Argon or Helium? Click here.
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- 1 Torr to 15 psig operating range
Powerful
and accurate gas composition at high pressures
- Self-contained: No pumps, RF power or PCs needed
Eliminates cost, maintenance and footprint required by differential pumps, RF power supplies and PC-based control computers
- Configurable to detect
binary or multi-gas chemistries
Built-in flexibility adapts to process chemistries.
- Detects
inert and diatomic gases
Measure composition of trace gases found in such common carrier gases as Argon Helium, Nitrogen and Oxygen
- Field-replaceable microplasma sensor cell
Perform routine sensor maintenance tasks quickly and easily
- Integrated light source, spectrometer and embedded data reduction capability
Simple installation on your gas supply line or chamber
- Ethernet, serial and Digital/Analog interface options
Choose the method best suited for easy integration
- Powerful process fingerprinting capability
Verionix Viewer software makes process monitoring and diagnostics easy to implement and use
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