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Verionix gas composition sensors come in several product variations that have been tailored to meet the most demanding applications in semiconductor process and gas distribution. Regardless of where they're used, all Verionix sensors feature compact size and ease of use that speed your pursuit of productivity.
Process Endpointing, Changes in Process Performance or MFCs, Process Matching
Want to know the chemistry of a process to determine its endpoint, or check for the presence of one or more species that can hurt your tool's productivity? Need to verify that your gas distribution system is delivering consistent gas flow wafer-to-wafer or tool-to-tool?Consider Verionix' full-featured Vx-2000 or Vx-3000 series process gas sensors. Learn more here.
Trace Nitrogen in Bulk Argon or Helium Supplies
Concerned about trace contaminates in bulk gas supplies - but don't need the power or flexibility of a Vx-3000 series sensor? Verionix' new Vx-6100 series bulk gas sensors are designed to detect trace amounts of Nitrogen in either bulk Argon or bulk Helium supplies while retaining the essential capabilities of Verionix unique microplasma-based technology. Learn more about these dedicated trace gas sensors here.
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